Huajun Qin's List: Graduation_Project

• A residual gas analyzer (RGA) is a small and usually rugged mass spectrometer, typically designed for process control and contamination monitoring in the semiconductor industry.
• RGAs are used in most cases to monitor the quality of the vacuum and easily detect minute traces of impurities in the low-pressure gas environment. These impurities can be measured down to 10 ^{− 14} Torr levels,
• OIS is the most widely available type of RGA.
• OIS RGAs measure residual gas levels without affecting the gas composition of their vacuum environment, though there are performance limitations which include:

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• Secondary emission in physics is a phenomenon where primary incident particles of sufficient energy, when hitting a surface or passing through some material, induce the emission of secondary particles. The primary particles are often charged particles like electrons or ions. If the secondary particles are electrons, the effect is termed secondary electron emission
• the number of secondary electrons emitted per incident particle is called secondary emission yield.